MEMS Metallization
Lohmann, Christian; Gottfried, Knut; Bertz, Andreas; Reuter, Danny; Hiller, Karla; Kuhn, Michael; Gessner, Thomas
- 期刊名称MRS Proceedings
- 作者Lohmann, Christian; Gottfried, Knut; Bertz, Andreas; Reuter, Danny; Hiller, Karla; Kuhn, Michael; Gessner, Thomas
- 卷第812卷
- 电子ISSN1946-4274
- 文件大小897.15KB
- 发表时间2004-1
- DOI10.1557/PROC-812-F8.1