Damping of a micro-resonator torsion mirror in rarefied gas ambient
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Minikes, Adi; Bucher, Izhak; Avivi, Gal
- 卷第15卷
- 期第9期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小362.45KB
- 发表时间2005-09-01
- DOI10.1088/0960-1317/15/9/019
- 页码1762-1769
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