![The Importance of OH groups Containing in Solid Films for High Sensitivity of Chemically Amplified Resists.]()
The Importance of OH groups Containing in Solid Films for High Sensitivity of Chemically Amplified Resists.Hirano, Yoshinori; Ohmori, Norihito; Okimoto, Noriaki; Hata, Masayuki; Hoshino, Tyuji; Tsuda, Minoru · Journal of Photopolymer Science and Technology · 2000