Simulation of Curl Compensation in MEMS Micromirror
- 期刊名称Journal of Physics: Conference Series
- 作者Tuantranont, Adisorn; Hemarat, Karawik; Wisitsoraat, Anurat
- 卷第34卷
- 印刷ISSN1742-6588
- 电子ISSN1742-6596
- 文件大小353.45KB
- 发表时间2006-04-01
- DOI10.1088/1742-6596/34/1/028
- 页码168-173
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