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Submicron patterning of a catalyst film by scanning probe nanolithography for a selective chemical vapor deposition of carbon nanotubes

Submicron patterning of a catalyst film by scanning probe nanolithography for a selective chemical vapor deposition of carbon nanotubes

P. Parisse; A. Verna; M. Rinaldi; F. Bussolotti; V. Grossi; M. Passacantando; M. Nardone; S. Santucci; L. Ottaviano
  • 作者P. Parisse; A. Verna; M. Rinaldi; F. Bussolotti; V. Grossi; M. Passacantando; M. Nardone; S. Santucci; L. Ottaviano
  • 文件大小563.01KB
  • 发表时间2007
  • DOI10.1063/1.2711144
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