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[ASME ASME/STLE 2007 International Joint Tribology Conference - San Diego, California, USA (October 22–24, 2007)] ASME/STLE 2007 International Joint Tribology Conference, Parts A and B - Tribological Challenges in MEMS/NEMS Devices

[ASME ASME/STLE 2007 International Joint Tribology Conference - San Diego, California, USA (October 22–24, 2007)] ASME/STLE 2007 International Joint Tribology Conference, Parts A and B - Tribological Challenges in MEMS/NEMS Devices

Patton, Steven T.; Voevodin, Andrey A.
  • 作者Patton, Steven T.; Voevodin, Andrey A.
  • 文件大小67.75KB
  • 发表时间2007
  • DOI10.1115/ijtc2007-44270
  • 页码857-859
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