![Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitrides]()
Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitridesPogrebnjak, A. D.; Yakushchenko, I. V.; Sobol’, O. V.; Beresnev, V. M.; Kupchishin, A. I.; Bondar, O. V.; Lisovenko, M. A.; Amekura, H.; Kono, K.; Oyoshi, K.; Takeda, Y. · Technical Physics · 2015