Minimizing linewidth roughness in Step and Flash Imprint Lithography
Niyaz Khusnatdinov; Gerard M. Schmid; Cynthia B. Brooks; Dwayne LaBrake; Douglas J. Resnick; Mark W. Hart; Kailash Gopalakrishnan; Rohit Shenoy; Ron Jih; Ying Zhang; Edmund Sikorski; Mary Beth Rothwell; Jordan Owens; Arnie Ford
- 作者Niyaz Khusnatdinov; Gerard M. Schmid; Cynthia B. Brooks; Dwayne LaBrake; Douglas J. Resnick; Mark W. Hart; Kailash Gopalakrishnan; Rohit Shenoy; Ron Jih; Ying Zhang; Edmund Sikorski; Mary Beth Rothwell; Jordan Owens; Arnie Ford
- 卷第85卷
- 印刷ISSN0167-9317
- 文件大小657.14KB
- 发表时间2008
- DOI10.1016/j.mee.2008.01.041
- 页码856-860