Challenges in etch: What's new?
- 作者Richard A. Gottscho; K. Nojiri; J. LaCara
- 卷第516卷
- 期第11期
- 印刷ISSN0040-6090
- 文件大小268.71KB
- 发表时间2008
- DOI10.1016/j.tsf.2007.08.105
- 页码3493-3496
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