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Optical, electrical and mechanical properties of RF-sputtered TiNWAu films

Optical, electrical and mechanical properties of RF-sputtered TiNWAu films

J.S. Kim; P.K. Banerjee; S.S. Mitra; H. Shastry; J.J. Loferski; R. Beaulieu

作者J.S. Kim; P.K. Banerjee; S.S. Mitra; H. Shastry; J.J. Loferski; R. Beaulieu
印刷ISSN0169-4332
文件大小315.00KB
发表时间1991
DOI10.1016/0169-4332(91)90389-2
页码548-554

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