![[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - A pulsed ion source by non metal shunting arc discharge]()
[IEEE 1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 - Kyoto, Japan (22-26 June 1998)] 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) - A pulsed ion source by non metal shunting arc dischargeYukimura, K.; Masamune, S.; Isono, R.; Monguchi, T.; Yashioka, K. · 1998