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Role of rapid thermal annealing in the formation of crystalline SiGe nanoparticles

Role of rapid thermal annealing in the formation of crystalline SiGe nanoparticles

Kapil U. Joshi; D. Kabiraj; A.M. Narsale; D.K. Avasthi; T.K. Gundurao; T.N. Warang; D.C. Kothari
  • 作者Kapil U. Joshi; D. Kabiraj; A.M. Narsale; D.K. Avasthi; T.K. Gundurao; T.N. Warang; D.C. Kothari
  • 卷第203卷
  • 印刷ISSN0257-8972
  • 文件大小425.46KB
  • 发表时间2009
  • DOI10.1016/j.surfcoat.2009.02.046
  • 页码2497-2500
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