![Subdiffraction plasmonic lens lithography prototype in stepper mode]()
Subdiffraction plasmonic lens lithography prototype in stepper modeLiu, Minggang; Zhao, Chengwei; Luo, Yunfei; Zhao, Zeyu; Wang, Yanqin; Gao, Ping; Wang, Changtao; Luo, Xiangang · Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena · 2017