![Sigma-Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge Control]()
Sigma-Delta Effects and Charge Locking in Capacitive MEMS under Dielectric Charge ControlGiounanlis, Panagiotis; Gorreta, Sergi; Dominguez-Pumar, Manuel; Pons-Nin, Joan; Feely, Orla; Blokhina, Elena · IEEE Transactions on Circuits and Systems II: Express Briefs · 2016