![Two-dimensional numerical simulation of radio frequency sputter amorphous In–Ga–Zn–O thin-film transistors]()
Two-dimensional numerical simulation of radio frequency sputter amorphous In–Ga–Zn–O thin-film transistorsFung, Tze-Ching; Chuang, Chiao-Shun; Chen, Charlene; Abe, Katsumi; Cottle, Robert; Townsend, Mark; Kumomi, Hideya; Kanicki, Jerzy · Journal of Applied Physics · 2009