Fourier transform infrared studies of the aluminum chemical vapor deposition using aluminum boro-hydride trimethylamine
- 作者S.W. Kang; Y.J. Park; J.Y. Yang; Y.H. Shin; J.Y. Yun
- 卷第518卷
- 期第8期
- 印刷ISSN0040-6090
- 文件大小1471.22KB
- 发表时间2010
- DOI10.1016/j.tsf.2009.07.159
- 页码2228-2233
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