Non-Gaussian Diffusion of Phosphorus and Arsenic in Silicon with Local Density Diffusivity Model
- 期刊名称Defect and Diffusion Forum
- 作者Wirbeleit, Frank
- 电子ISSN1662-9507
- 文件大小456.34KB
- 发表时间2010-7
- DOI10.4028/www.scientific.net/DDF.303-304.21
- 页码21-29
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