Chloride Based CVD of 3C-SiC on (0001) α-SiC Substrates
- 期刊名称Materials Science Forum
- 作者Henry, Anne; Leone, Stefano; Beyer, Franziska Christine; Andersson, Sven; Kordina, Olle; Janzén, Erik
- 电子ISSN1662-9752
- 文件大小580.34KB
- 发表时间2011-3
- DOI10.4028/www.scientific.net/MSF.679-680.75
- 页码75-78
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