Research on Phase Compensation of Nonlinearity Error in Heterodyne Interferometer
- 期刊名称Applied Mechanics and Materials
- 作者Ren, Xiao; Hou, Wen Mei
- 电子ISSN1662-7482
- 文件大小364.34KB
- 发表时间2012-12
- DOI10.4028/www.scientific.net/AMM.263-266.435
- 页码435-443
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