![MEMS Device for Quantitative In Situ Mechanical Testing in Electron Microscope]()
MEMS Device for Quantitative In Situ Mechanical Testing in Electron MicroscopeWang, Xiaodong; Mao, Shengcheng; Zhang, Jianfei; Li, Zhipeng; Deng, Qingsong; Ning, Jin; Yang, Xudong; Wang, Li; Ji, Yuan; Li, Xiaochen; Liu, Yinong; Zhang, Ze; Han, Xiaodong · Micromachines · 2017