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Type of distortionless through silicon via design based on the multiwalled carbon nanotube

Type of distortionless through silicon via design based on the multiwalled carbon nanotube

Zhu, Zhangming; Yang, Yintang; Lu, Qijun; Ding, Ruixue
  • 期刊名称Micro & Nano Letters
  • 作者Zhu, Zhangming; Yang, Yintang; Lu, Qijun; Ding, Ruixue
  • 卷第8卷
  • 期第12期
  • 电子ISSN1750-0443
  • 文件大小260.43KB
  • 发表时间2013-12-01
  • DOI10.1049/mnl.2013.0610
  • 页码869-871
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