![SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Optical/Laser Microlithography III - <title>New indexes of the 0.5-μm resolution resist for optical lithography</title>]()
SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Optical/Laser Microlithography III - <title>New indexes of the 0.5-μm resolution resist for optical lithography</title>Sugimoto, Aritoshi; Ito, Tetsuo; Okano, Sadao; Nozaki, Masahiro; Kato, Takeshi; Suko, Kazuyuki; Tsunematsu, Masayasu; Kadota, Kazuya; Pol, Victor · 1990