Morphology of oxygen precipitates in silicon wafers pre-treated by rapid thermal annealing
Kot, D.; Kissinger, G.; Schubert, M. A.; Sattler, A.
- 期刊名称Applied Physics Letters
- 作者Kot, D.; Kissinger, G.; Schubert, M. A.; Sattler, A.
- 卷第104卷
- 期第18期
- 印刷ISSN0003-6951
- 电子ISSN1077-3118
- 文件大小762.72KB
- 发表时间2014-05-05
- DOI10.1063/1.4875278