![[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Understanding implant damage by implant channeling profile measurements]()
[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Understanding implant damage by implant channeling profile measurementsPackan, P.; Kennel, H.; Thompson, S.; Corcoran, S.; Taylor, M. · 1997