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Lift-off patterning of thermoelectric thick films deposited by a thermally assisted sputtering method

Mizoshiri, Mizue; Mikami, Masashi; Ozaki, Kimihiro; Shikida, Mitsuhiro; Hata, Seiichi

期刊名称Applied Physics Express
作者Mizoshiri, Mizue; Mikami, Masashi; Ozaki, Kimihiro; Shikida, Mitsuhiro; Hata, Seiichi
卷第7卷
期第5期
印刷ISSN1882-0778
电子ISSN1882-0786
文件大小161.30KB
发表时间2014-05-01
DOI10.7567/APEX.7.057101

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