![Study of the bias voltage influence on the structure, texture and residual stresses in Ta coatings deposited on a copper substrate of inverted magnetron]()
Study of the bias voltage influence on the structure, texture and residual stresses in Ta coatings deposited on a copper substrate of inverted magnetronLenkovets, A S; Lozovan, A A; Betsofen, S Ya; Bespalov, A V; Grushin, I A; Ivanov, N A · Journal of Physics: Conference Series · 2019