![SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - <title>MEMS-based thin palladium membrane microreactors</title>]()
SPIE Proceedings [SPIE ICI20:MEMS, MOEMS, and NEMS - Changchun, China (Sunday 21 August 2005)] ICO20: MEMS, MOEMS, and NEMS - <title>MEMS-based thin palladium membrane microreactors</title>Ye, S.-Y.; Tanaka, S.; Esashi, M.; Hamakawa, S.; Hanaoka, T; Mizukami, F.; Esashi, Masayoshi; Zhou, Zhaoying · 2006