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Enhanced electrical properties of AZO thin films grown on different substrates by using a facing-target sputtering system with hetero targets

Enhanced electrical properties of AZO thin films grown on different substrates by using a facing-target sputtering system with hetero targets

Lee, ChangHyun; Bae, Kang; Jin, IkHyeon; Kim, HwaMin; Sohn, SunYoung

期刊名称Journal of the Korean Physical Society
作者Lee, ChangHyun; Bae, Kang; Jin, IkHyeon; Kim, HwaMin; Sohn, SunYoung
卷第67卷
期第6期
印刷ISSN0374-4884
电子ISSN1976-8524
文件大小765.81KB
发表时间2015-9
DOI10.3938/jkps.67.1007
页码1007-1012

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