![Diffusion of hydrogen atoms in silicon layers deposited from molecular beams on dielectric substrates]()
Diffusion of hydrogen atoms in silicon layers deposited from molecular beams on dielectric substratesChizh, Kirill V.; Arapkina, Larisa V.; Stavrovsky, Dmitry B.; Gaiduk, Peter I.; Yuryev, Vladimir A. · Materials Science in Semiconductor Processing · 2019