![SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Modeling Aspects in Optical Metrology II - Assistance system for optical sensors]()
SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Modeling Aspects in Optical Metrology II - Assistance system for optical sensorsSchmitt, R.; Bosse, Harald; Bodermann, Bernd; Koerfer, F.; Seewig, J.; Silver, Richard M.; Osten, W.; Weckenmann, A. · 2009