![Scatterometry for nanoimprint lithography]()
Scatterometry for nanoimprint lithographyZhu, Ruichao; Brueck, Steven R. J.; Dawson, Noel; Busani, Tito; Joseph, Praveen; Singhal, Shrawan; Sreenivasan, S. V. · Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena · 2016