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[IEEE 2017 IEEE International Interconnect Technology Conference (IITC) - HsinChu, Taiwan (2017.5.16-2017.5.18)] 2017 IEEE International Interconnect Technology Conference (IITC) - Metallurgical and electrical characterization of ultrathin CoTi<inf>x</inf> liner/barrier for Cu interconnects

[IEEE 2017 IEEE International Interconnect Technology Conference (IITC) - HsinChu, Taiwan (2017.5.16-2017.5.18)] 2017 IEEE International Interconnect Technology Conference (IITC) - Metallurgical and electrical characterization of ultrathin CoTix liner/barrier for Cu interconnects

Hosseini, Maryamsadat; Koike, Junichi

作者Hosseini, Maryamsadat; Koike, Junichi
文件大小369.26KB
发表时间2017
DOI10.1109/IITC-AMC.2017.7968959
页码1-3

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