Sharp GaN nanowires used as field emitter on active cantilevers for scanning probe lithography

Lenk, Claudia; Hofmann, Martin; Ivanov, Tzvetan; Ahmad, Ahmad; Lenk, Steve; Rangelow, Ivo W.; Reum, Alexander; Reuter, Christoph; Holz, Mathias; Behzadirad, Mahmoud; Rishinaramangalam, Ashwin K.; Feezell, Daniel; Busani, Tito

期刊名称Journal of Vacuum Science & Technology B
作者Lenk, Claudia; Hofmann, Martin; Ivanov, Tzvetan; Ahmad, Ahmad; Lenk, Steve; Rangelow, Ivo W.; Reum, Alexander; Reuter, Christoph; Holz, Mathias; Behzadirad, Mahmoud; Rishinaramangalam, Ashwin K.; Feezell, Daniel; Busani, Tito
卷第36卷
期第6期
印刷ISSN2166-2746
电子ISSN2166-2754
文件大小1488.02KB
发表时间2018-11
DOI10.1116/1.5048190

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Sharp GaN nanowires used as field emitter on active cantilevers for scanning probe lithography