Field-emission scanning probe lithography tool for 150 mm wafer

Holz, Mathias; Guliyev, Elshad; Ahmad, Ahmad; Ivanov, Tzvetan; Reum, Alexander; Hofmann, Martin; Lenk, Claudia; Kaestner, Marcus; Reuter, Christoph; Lenk, Steve; Rangelow, Ivo W.; Nikolov, Nikolay

期刊名称Journal of Vacuum Science & Technology B
作者Holz, Mathias; Guliyev, Elshad; Ahmad, Ahmad; Ivanov, Tzvetan; Reum, Alexander; Hofmann, Martin; Lenk, Claudia; Kaestner, Marcus; Reuter, Christoph; Lenk, Steve; Rangelow, Ivo W.; Nikolov, Nikolay
卷第36卷
期第6期
印刷ISSN2166-2746
电子ISSN2166-2754
文件大小7566.54KB
发表时间2018-11
DOI10.1116/1.5048357

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Field-emission scanning probe lithography tool for 150 mm wafer