![Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi Diffraction]()
Structural and Electrical Comparison of Si and Zr Doped Hafnium Oxide Thin Films and Integrated FeFETs Utilizing Transmission Kikuchi DiffractionLederer, Maximilian; Kämpfe, Thomas; Vogel, Norman; Utess, Dirk; Volkmann, Beate; Ali, Tarek; Olivo, Ricardo; Müller, Johannes; Beyer, Sven; Trentzsch, Martin; Seidel, Konrad; Eng, and Lukas M. · Nanomaterials · 2020