![SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Projection maskless lithography]()
SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Projection maskless lithographyBrandstatter, Christoph; Mackay, R. Scott; Loeschner, Hans; Stengl, Gerhard; Lammer, Gertraud; Buschbeck, Herbert; Platzgummer, Elmar; Doring, Hans-Joachim; Elster, Thomas; Fortagne, Olaf · 2004