![Superconformal Electrodeposition of Silver in Submicrometer Features]()
Superconformal Electrodeposition of Silver in Submicrometer FeaturesMoffat, T. P.; Baker, B.; Wheeler, D.; Bonevich, J. E.; Edelstein, M.; Kelly, D. R.; Gan, L.; Stafford, G. R.; Chen, P. J.; Egelhoff, W. F.; Josell, D. · Journal of The Electrochemical Society · 2002