![[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Transition of MEMS technology to nanofabrication]()
[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - Transition of MEMS technology to nanofabricationJakeway, S.C.; Crabtree, H.J.; Veres, T.; Cameron, N.S.; Luesebrink, H.; Glinsner, T. · 2003