![Implantation temperature dependence of electrical activation, solubility, and diffusion of implanted Te, Cd, and Sn in GaAs]()
Implantation temperature dependence of electrical activation, solubility, and diffusion of implanted Te, Cd, and Sn in GaAsPearton, S. J.; Williams, J. S.; Short, K. T.; Johnson, S. T.; Jacobsen, D. C.; Poate, J. M.; Gibson, J. M.; Boerma, D. O. · Journal of Applied Physics · 1989