Optical characterization of polycrystalline silicon before and after thermal oxidation
- 作者P. Montaudon; M.H. Debroux; F. Ferrieu; A. Vareille
- 卷第125卷
- 印刷ISSN0040-6090
- 文件大小342.93KB
- 发表时间1985
- DOI10.1016/0040-6090(85)90227-5
- 页码235-241
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