Gate electrode material for MOS VLSI's.
- 期刊名称Bulletin of the Japan Institute of Metals
- 作者Iwata, Seiichi
- 卷第25卷
- 期第6期
- 印刷ISSN0021-4426
- 电子ISSN1884-5835
- 文件大小3394.96KB
- 发表时间1986
- DOI10.2320/materia1962.25.491
- 页码491-496
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