The Evolution of Periodic Step Arrays on Si by Surface Diffusion
- 期刊名称MRS Proceedings
- 作者Keeffe, Mary E.; Umbach, C. C.; Blakely, Jack M.
- 卷第237卷
- 电子ISSN1946-4274
- 文件大小4292.13KB
- 发表时间1991-1
- DOI10.1557/proc-237-205
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