海量图书期刊资源，随时随地畅享阅读乐趣
Advanced resist processing for thick photoresist applicationsE. Cullmann; B. Loechel; A. Maciossek; M. Rothe · 1996
Dependence of the quality of thick resist structures on resist bakingG. Bleidiessel; G. Gruetzner; F. Reuther; S. Fehlberg; B. Loechel; A. Maciossek · 1998