Compact sputtering apparatus for depositing Co–Cr alloy thin films in magnetic disks
- 作者Yoshitaka Kitamoto; Masanori Abe; Masahiko Naoe
- 卷第51卷
- 期第4期
- 印刷ISSN0042-207X
- 文件大小347.10KB
- 发表时间1998
- DOI10.1016/s0042-207x(98)00256-5
- 页码571-574
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