![High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy]()
High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopyLai, Yiu Wai; Krause, Michael; Savan, Alan; Thienhaus, Sigurd; Koukourakis, Nektarios; Hofmann, Martin R; Ludwig, Alfred · Science and Technology of Advanced Materials · 2011