A modular approach for simulation-based optimization of MEMS
- 作者Peter Schneider; André Schneider; Peter Schwarz
- 卷第33卷
- 印刷ISSN0026-2692
- 文件大小729.03KB
- 发表时间2002
- DOI10.1016/s0026-2692(01)00101-x
- 页码29-38
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