SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MOEMS and Miniaturized Systems V - A membrane mirror with transparent electrode for adaptive optics
- 作者Kurczynski, Peter L.; El-Fatatry, Ayman; Dyson, Harold M.; Sadoulet, Bernard; Bower, J. Eric; Lai, Warren Y.; Mansfield, William M.; Taylor, J. Ashley
- 卷第5719卷
- 印刷ISSN0277-786X
- 文件大小453.98KB
- 发表时间2005
- DOI10.1117/12.593234
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