![SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Micro- and Nanometrology in Microsystems Technology II - AlN driven microcantilever actuators: modeling, fabrication, characterization]()
SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Micro- and Nanometrology in Microsystems Technology II - AlN driven microcantilever actuators: modeling, fabrication, characterizationKrupa, K.; Gorecki, Christophe; Asundi, Anand K.; Józwik, M.; Andrei, A.; Osten, Wolfgang; Nieradko, Ł.; Gorecki, C.; Delobelle, P.; Hirsinger, L. · 2008