Homoepitaxial growth rate measurement using in situ reflectance anisotropy spectroscopy
- 作者Christian Kaspari; Markus Pristovsek; Wolfgang Richter
- 卷第298卷
- 印刷ISSN0022-0248
- 文件大小345.62KB
- 发表时间2007
- DOI10.1016/j.jcrysgro.2006.10.039
- 页码46-49
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