![[IEEE 6th International Conference on Properties and Applications of Dielectric Materials - Xi'an, China (21-26 June 2000)] Proceedings of the 6th International Conference on Properties and Applications of Dielectric Materials (Cat. No.00CH36347) - Study on an effect of nitrogenation on microstructure properties of hydrogenated amorphous carbon films]()
[IEEE 6th International Conference on Properties and Applications of Dielectric Materials - Xi'an, China (21-26 June 2000)] Proceedings of the 6th International Conference on Properties and Applications of Dielectric Materials (Cat. No.00CH36347) - Study on an effect of nitrogenation on microstructure properties of hydrogenated amorphous carbon filmsRong Xingfu, ; Qin Zhiyu, · 2000